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CMP設備

CMP是在IC 制造工程中晶圓表面平坦化工藝之一環,使用化學研磨劑、研磨墊等,通過化學和機械的復合作用,對晶圓表面的凹凸不平進行研磨,達到平坦化要求的設備。

  • ChaMP:小型CMP裝置
    ChaMP:小型CMP設備
    半導體器件量產用,搭載了高性能CMP技術的小型化CMP設備。

亚洲乱亚洲乱妇24p
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